iMACS™: Ionized Molecular Activated Coherent Solution

Nano Green Technology (NGT) has developed iMACS, a nano technology based on the principles of quantum electrodynamics (QED) and has received multiple awards for iMACS and the SC3™ process.

In 2009, NGT won the Best of West Award at SEMICON West, the largest microelectronics exposition in North America.

Also in 2009, NGT won the North American Semiconductor Wafer Cleaning Green Excellence of the Year Award for demonstrating a unique product design aligned with sustainable and environmentally conscious objectives within its industry sector.

iMACS removes all organic inorganic residues, bacteria, nano particles, metal contaminants, and ionic contaminants from any surface.

Infineon Germany and IMEC validated this revolutionary technology, and the results were presented at the annual Surface Preparation Cleaning Conference (SPCC) in 2007. The work was published by the Electrochemical Society.

In addition, two leading device manufacturers conducted tests with iMACS, including a comparison of the effectiveness of iMACS on various particle sizes significantly below 40 nm. Results showed a drastic improvement for all sizes below 75nm and up to 20% improvement over the current process of record (POR).